15.2 UHV Isolation Gate Valve

UHV Valves by VAT Group (CH)

15.2 UHV Isolation Gate Valve – UHV Valves by VAT Group

Overview

Ultra-high vacuum isolation gate valve with MONOVAT technology designed for exceptionally low shock and particle generation. Features pneumatic double-acting actuator with position indicator, split body design for easy maintenance, welded metal bellows feedthrough sealing. Available in DN 63, DN 100, DN 160, and DN 200 sizes with standard flanges (ISO-F, CF-F, ASA-LP, JIS).

Specifications

Pressure Range1 × 10⁻¹⁰ mbar
Max Bakeout Temperature250 C
Valve TypeIsolation Gate Valve (UHV - Ultra High Vacuum) N/A
Leak Rate Seat1 × 10⁻⁹ mbar L/s
Leak Rate Seat1 × 10⁻⁹ mbar L/s

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