15.2 UHV Isolation Gate Valve
UHV Valves by VAT Group (CH)
Overview
Ultra-high vacuum isolation gate valve with MONOVAT technology designed for exceptionally low shock and particle generation. Features pneumatic double-acting actuator with position indicator, split body design for easy maintenance, welded metal bellows feedthrough sealing. Available in DN 63, DN 100, DN 160, and DN 200 sizes with standard flanges (ISO-F, CF-F, ASA-LP, JIS).
Specifications
| Pressure Range | 1 × 10⁻¹⁰ mbar |
|---|---|
| Max Bakeout Temperature | 250 C |
| Valve Type | Isolation Gate Valve (UHV - Ultra High Vacuum) N/A |
| Leak Rate Seat | 1 × 10⁻⁹ mbar L/s |
| Leak Rate Seat | 1 × 10⁻⁹ mbar L/s |
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