28.4 UHV Angle Valve

UHV Valves by VAT Group (CH)

28.4 UHV Angle Valve – UHV Valves by VAT Group

Overview

28.4 UHV Angle Valve series for ultra-high vacuum applications, with stainless steel body, CF-R rotatable flanges, metal bonnet seal and FKM gate seal, available in DN 16–63 mm with manual or pneumatic actuation and qualified for bake-out up to 200 °C (manual) or 150 °C (pneumatic).

Specifications

Pressure Range5 × 10⁻¹⁰ mbar
Max Bakeout Temperature200 C
Valve TypeUHV Angle Valve N/A
Leak Rate Seat1 × 10⁻⁹ mbar L/s
Leak Rate Seat1 × 10⁻⁹ mbar L/s

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